| ICM 10 Custom System
Access the Advantages of Inverted Cylindrical Magnetron Sputtering
With today's emphasis on lean manufacturing and just-in-time
delivery, reducing turn-around time is important in
any business. The ICM 10, manufactured by VPT for Isoflux,
Inc., is a unique rapid-cycle coater for high quality
functional, as well as hard / decorative coating applications. Now it is
possible for manufacturers, distributors, and coating service centers to economically provide
coatings in hours rather than days. The ICM 10 uses
proprietary cylindrical magnetron technology to coat
batches of parts quickly with outstanding reliability.
As an example, up to three microns of titanium nitride
can be deposited within one hour and the entire coating
cycle from pumpdown to vent is just ninety minutes!
With its exclusive hollow cylinder cathode, the ICM
10 positions all of the parts all of the time, in an
area of high, even temperature and flux density right
inside the cylindrical target. The target actually surrounds
the parts! Furthermore, proprietary Isoflux designs
produce very high ionization densities within the coating
volume, resulting in extremely tough coatings. Other
technical advantages available include the AC-powered, dual
target sputtering system for very high-rate deposition of
dielectric materials such as aluminum oxide, as well
as conducting materials.
The ICM 10 is fully automated and is based on a user-friendly PLC
platform and RSView 32 HMI interface. It comes with
pre-loaded recipes for the most popular hard and decorative
materials, including titanium nitride, titanium-aluminum
nitride, titanium-carbo nitride, zirconium nitride,
and chromium nitride. Unique recipes to meet customer's
specific needs can also be added. A single button starts
the process and the machine automatically takes the
parts through the plasma heating and cleaning, preconditioning,
deposition, and cooling steps.
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