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Custom Vacuum Deposition Systems
In addition to batch systems
with chambers ranging in size from 24 to 120 inches, VPT also offers Custom Vacuum Deposition Systems.
The configuration of these systems are custom designed
and manufactured in accordance with a customer's specific
process, production, and hardware requirements.
Custom Plasma Treatment Systems
VPT's Plasma Treatment Systems are used for cleaning,
etching or surface modification of various materials.
Chambers can range in size and geometry and include:
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Batch or in-line configurations |
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Engineering features which maximize
throughput and minimize cycle time |
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Aluminum chamber construction |
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Internal faraday cage and electrode
designed for process consistency and uniformity |
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RF power up to 5kW |
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Automatic matching network |
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Multiple gas flow control system |
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Click here for the Custom Vacuum Deposition Systems Brochure. |
